電漿化學氣相沈積氮化鋁薄膜之研究
碩士 === 國立成功大學 === 礦冶及材料科學研究所 === 77 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1989
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/45275816832910095459 |
碩士 === 國立成功大學 === 礦冶及材料科學研究所 === 77 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1989
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/45275816832910095459 |