Self-aligned titanium silicide technology for VLSI applications

碩士 === 國立成功大學 === 電機工程研究所 === 77 ===

Bibliographic Details
Main Authors: Xu, Zheng-Gui, 許正貴
Other Authors: Zhang, Zun-Yan
Format: Others
Language:zh-TW
Published: 1989
Online Access:http://ndltd.ncl.edu.tw/handle/49655578964735167389