Recrystallization of PECVD amorphous silicon films on SiO2 substrates
碩士 === 國立交通大學 === 電子研究所 === 78 ===
Main Authors: | ZHANG,RUI-DA, 張睿達 |
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Other Authors: | ZHENG,HUANG-ZHONG |
Format: | Others |
Language: | zh-TW |
Published: |
1990
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Online Access: | http://ndltd.ncl.edu.tw/handle/58504932574235698311 |
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