Shallow junction formation using implantation of BF2 ions through poly-Si film

碩士 === 國立交通大學 === 電子研究所 === 78 ===

Bibliographic Details
Main Authors: ZHAN,SHANG-TANG, 詹尚堂
Other Authors: ZHENG,HUANG-ZHONG
Format: Others
Language:zh-TW
Published: 1991
Online Access:http://ndltd.ncl.edu.tw/handle/22782544989860662694