Effects of phosphorus diffusion and MoSi2 polycide structure on the electrical characteristics of gate oxides
碩士 === 國立交通大學 === 光電工程研究所 === 79 ===
Main Authors: | LI,ZONG-SHU, 李宗樞 |
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Other Authors: | ZHENG,HUANG-ZHONG |
Format: | Others |
Language: | zh-TW |
Published: |
1991
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Online Access: | http://ndltd.ncl.edu.tw/handle/46032148308988387177 |
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