有機金屬化學氣相沈積法成長碲化鎘異質磊晶及其熱力學研究
博士 === 國立清華大學 === 化學工程研究所 === 79 === With the high potential of mass production by MOCVD process and the probadility of material and device hybridization for hateroepitaxy, the growth of CdTe/GaAs heteroepitaxial films by MOCVD process was studied in thi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1990
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Online Access: | http://ndltd.ncl.edu.tw/handle/48664346598129339772 |