Fabrication and analysis of diamond-like amorphous hydrogenated carbon films made by RF-sputtering in Ne-H�痂ixtures
碩士 === 國立成功大學 === 物理研究所 === 80 ===
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1992
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67236389077786610317 |