Material properties and process technologies of Ti/Si system relevant to VLSI applications
博士 === 國立交通大學 === 電子研究所 === 80 ===
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| Format: | Others |
| Language: | en_US |
| Published: |
1992
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61041761095660349672 |