Titanium carbide thin films grown by reactive r.f. magnetron sputtering
碩士 === 國立交通大學 === 電子研究所 === 81 === The experiments were performed in a diode magnetron r.f. sputtering unit. The deposition rate, composition, diffraction spectra, depth profile, cross section and surface microstructure of the TiC thi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06076245950028682073 |