Low temperature silicon epitaxial growth by plasma enhanced chemical vapor deposition
博士 === 國立台灣工業技術學院 === 化學工程技術研究所 === 81 ===
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1993
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/52684092564705128377 |