The Growth of ZnO Thin Films on IDT/Glass Structure for SAW Applications
碩士 === 大同工學院 === 電機工程研究所 === 81 === Several sputtering parameters have been tried to get a high quality thin film on IDT/glass structure. We use a two-step process to find the optimum conditions for growing ZnO films on IDT/glass structure....
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1993
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/18119580194686322176 |