The Growth of ZnO Thin Films on IDT/Glass Structure for SAW Applications
碩士 === 大同工學院 === 電機工程研究所 === 81 === Several sputtering parameters have been tried to get a high quality thin film on IDT/glass structure. We use a two-step process to find the optimum conditions for growing ZnO films on IDT/glass structure....
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18119580194686322176 |
| Summary: | 碩士 === 大同工學院 === 電機工程研究所 === 81 === Several sputtering parameters have been tried to get a high
quality thin film on IDT/glass structure. We use a two-step
process to find the optimum conditions for growing ZnO films on
IDT/glass structure. The results show that the SAW properties
are better for those films obtained by two-step fabrication
than those obtained by traditional one-step fabrication. The
coupling coefficient of more than 98% of the theoretical values
was obtained.
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