Summary: | 碩士 === 國立交通大學 === 電子研究所 === 82 === In this thesis, a new EEPROM cell using the p-channel poly- Si
TFT for erasure operation is proposed and analyzed. The TFT
device is fabricated on the seond poly-silicon layer of conven-
tional stacked-gate flash EEPROM. In the proposed new EEPROM
device, the hot-hole injection from the TFT device to the
float- ing gate is used for cell erasure. Since the hot-hole
generation in the short channel p-channel TFT devices is more
serious than that in the single-crystalline MOSFETs, an
effective erasure is expected. In addition, the different
program/erase paths in our device can reduce the occurrence of
oxide breakdown and increase the reliability. The proposed cell
can be used as the normal EEPROM cell and the flash EEPROM
cell. From the simulation re- sults using the TMA MEDICI
simulator, the erase operation has been verified. It is shown
thatthe erase time can be reduced to tens of microseconds with
the comparable erasing voltages as in the conventional EEPROM.
Future researches on device optimiza- tion, experimental
verification, and real EEPROM design will be done.
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