Silicon-On-Insulator Structure by Wafer Bonding
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 82 === Wafer bonding is an attractive technique for silicon-on- insulator (SOI) structure. To apply this method to SOI structure, it is very important to obtain void-free interface. Two sufficiently flat, s...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92177686740946934699 |