The Effect of The Solid Layer For The Modified Chemical Vapor Deposition Process
碩士 === 元智大學 === 機械工程研究所 === 82 === The conjugate heat transfer problem relative to the modified chemical vapor deposition process has been numerically analyzed and the effects of solid layer thickness,torch speed and tube rotation are studi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/16259296728805340971 |