Preparation and Characterization of Crystalline Silicon Thin Film on Silicon Carbide
碩士 === 國立成功大學 === 電機工程研究所 === 83 === Being obtainable easily, economical and stable in device characteristics, silicon has become one ofmost important materials in the present semiconductorustry. With the wide bandgap, silicon carbide is us...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84764643432759134212 |