Modified Peocess Control Chart in IC Fabrication -Using Clustering Analysis
碩士 === 國立交通大學 === 工業工程研究所 === 83 === As the surface area of the wafer of Integrated increases, the clustering phenomenon of the defects become apparent. This phenomenon disabled the conventional C-chare based on Poisson distribution used in analyzing. A...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04040850575874476085 |