Modified Peocess Control Chart in IC Fabrication -Using Clustering Analysis
碩士 === 國立交通大學 === 工業工程研究所 === 83 === As the surface area of the wafer of Integrated increases, the clustering phenomenon of the defects become apparent. This phenomenon disabled the conventional C-chare based on Poisson distribution used in analyzing. A...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04040850575874476085 |
| Summary: | 碩士 === 國立交通大學 === 工業工程研究所 === 83 === As the surface area of the wafer of Integrated increases, the
clustering phenomenon of the defects become apparent. This
phenomenon disabled the conventional C-chare based on Poisson
distribution used in analyzing. Although the latest thesis did
take clustering phenomenon into consideration and use other
distribution instead, the use of the distribution and whether
or not user friendly is still left a question. The purpose of
this thesis is to use the method of clustering analysis to find
out the quantity and the center of defects. A reasonable
modification will be made so that the modified number of
defects can match Poisson distribution which can be inplemented
C-chart easily and friendly.
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