Fabrication and Study of ZrTiO4-Based Dielectric Thin Films

博士 === 國立交通大學 === 電子研究所 === 83 === This dissertation presents the depostion processes and physical properties of ZrTiO4-based dielectric thin films in this research, including the fabrication of PLZT ferroelectric thin film by sol-gel spin coating and the...

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Bibliographic Details
Main Authors: De-An Chang, 張德安
Other Authors: Tseung-Yuen Tseng, Pang Lin
Format: Others
Language:en_US
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/53907440006346573208