A Study of Polycrystalline Silicon Thin-Film Transistors Fabricated by Ultra-High Vacuum/ Chemical Vapor Deposition
碩士 === 國立交通大學 === 電子研究所 === 83 === In this research,high performance bottom-gate and top- gate poly-Si TFTs with active layer grown by ultra-high vacuum /chemical vapor deposition (UHV/CVD) system have been success- fully fabricated, and fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49100576616940166154 |