Investigation of selective liquid-phase deposition technology for silicon oxide
碩士 === 國立交通大學 === 電子研究所 === 83 === In this thesis, we introduce the growth mechanism and the chemical reaction equations of LPD. We employ H3BO3 to control and increase the concentration of the supersaturated Si(OH)4 in our immersion soluti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77320069039876519404 |