Influences of sputtering power and oxygen percentage on the properties of R. F. magnetron sputtered ITO films and the design of antireflective coating for ITO films deposited on glass substrate
碩士 === 國立交通大學 === 電子研究所 === 83 === Indium tin oxide (ITO) were deposited onto unheated glass and polycarbonate substrates by r.f. magnetron sputtering. The properties of ITO films prepared at various r.f. powers and oxygen percentages are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28015502825777359884 |