Syntheses of Imidoniobium Complexes and Chemical Vapor ion of Niobium Carbonitride Thin Films
碩士 === 國立交通大學 === 應用化學系 === 83 === The syntheses and characterization of organimidoniobium complexes are reported. N-propylimido-tetrakis(diethylamido) niobium was used as a singal source precursor to deposite thinms of NbCxNy by chemical...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17731609142387865891 |