The Study of Hard Films by Cathodic Arc Plasma Deposition Method
碩士 === 國立臺灣科技大學 === 化學工程研究所 === 83 === In tihis thesis, we explored the application of cathodic arc plasma technique in the deposition of (i)diamond-like film, (ii) hard films such as TiN, TiC and TiCN. Diamond-like film was deposited using high density...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/67007795681131096079 |