Study of Relationship between In-Line Inspection and Yield in IC Fabrication
碩士 === 國立交通大學 === 工業工程研究所 === 84 === In integrated circuit(IC) fabrication, wafer's defect have an important impact on its yield. The wafer inspection machine, such as KLA, is often used for in-line inspection to detect the defects on...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32751760555957814746 |