The prediction on the Ellipsometric measurement of an uniaxial medium

碩士 === 國立交通大學 === 光電工程研究所 === 84 === Ellipsometry has been recognized in recent years as powerful and versatile diagnostics tool for material surface studies. It has been used by variousdisciplines of sciences and engineering in a wide...

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Bibliographic Details
Main Authors: Ko, Zen-Chieh, 寇人傑
Other Authors: Y.F. Chao
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/73272561348011576161
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Summary:碩士 === 國立交通大學 === 光電工程研究所 === 84 === Ellipsometry has been recognized in recent years as powerful and versatile diagnostics tool for material surface studies. It has been used by variousdisciplines of sciences and engineering in a wide varity of applications. Inthis thesis we use ellipsometric theory to determine the optical properties of isotropic and anisotrpic media. We improve the program provided by NDL. The program can determine the optical constants ( such as complex refractive index,film thickness ) of isotropic media under monochromatic incident light at fixedincident angle condition. We expand the program into spectroscopic ellipsometryand multiple angle of incidence case. Another program calculates the ellipsometric parameters of anisotropic media. We dicuss the dependence of the ellipsometric parameters as a function of azimuthal angle of optical axis. We also show the ellipsometric parametersis very sensitive to the magnitude of the dielectric tensor and the orentationof optical axis to the sample surface.