The development of microelectromechanical comb actuators
碩士 === 國立交通大學 === 電子研究所 === 84 === This thesis presents the comb actuators in surface micromachining. The goal ofthis thesis is to establish a foundation for electrostatically exciting and sensing suspended transducer elements based on comb-drive struct...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73434818731300654394 |