The development of microelectromechanical comb actuators

碩士 === 國立交通大學 === 電子研究所 === 84 === This thesis presents the comb actuators in surface micromachining. The goal ofthis thesis is to establish a foundation for electrostatically exciting and sensing suspended transducer elements based on comb-drive struct...

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Bibliographic Details
Main Authors:	Tsai, Guang-Rong, 蔡光榮
Other Authors:	Su Shyang
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/73434818731300654394

id	ndltd-TW-084NCTU0430049
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spelling	ndltd-TW-084NCTU04300492016-02-05T04:16:36Z http://ndltd.ncl.edu.tw/handle/73434818731300654394 The development of microelectromechanical comb actuators 微小機電梳狀結構致動器之研製 Tsai, Guang-Rong 蔡光榮碩士國立交通大學電子研究所 84 This thesis presents the comb actuators in surface micromachining. The goal ofthis thesis is to establish a foundation for electrostatically exciting and sensing suspended transducer elements based on comb-drive structure, with the viewpoint on potential resonant sensor and actuator applications. Anisotropic etching with RIE process is used to improve electric field coupling. Besides, high phosphorus-doped concentration can offer more free electron to build up high electric attractive force between two electrodes. To avoid sticking problem, the low stress of thin film is needed. LPCVD polysilicon annealed at 1050℃ was adopted for the reduction of film stress. Su Shyang 蘇翔 1996 學位論文 ; thesis 37 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 電子研究所 === 84 === This thesis presents the comb actuators in surface micromachining. The goal ofthis thesis is to establish a foundation for electrostatically exciting and sensing suspended transducer elements based on comb-drive structure, with the viewpoint on potential resonant sensor and actuator applications. Anisotropic etching with RIE process is used to improve electric field coupling. Besides, high phosphorus-doped concentration can offer more free electron to build up high electric attractive force between two electrodes. To avoid sticking problem, the low stress of thin film is needed. LPCVD polysilicon annealed at 1050℃ was adopted for the reduction of film stress.
author2	Su Shyang
author_facet	Su Shyang Tsai, Guang-Rong 蔡光榮
author	Tsai, Guang-Rong 蔡光榮
spellingShingle	Tsai, Guang-Rong 蔡光榮 The development of microelectromechanical comb actuators
author_sort	Tsai, Guang-Rong
title	The development of microelectromechanical comb actuators
title_short	The development of microelectromechanical comb actuators
title_full	The development of microelectromechanical comb actuators
title_fullStr	The development of microelectromechanical comb actuators
title_full_unstemmed	The development of microelectromechanical comb actuators
title_sort	development of microelectromechanical comb actuators
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/73434818731300654394
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The development of microelectromechanical comb actuators

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