Three Electrodes Capacitive Pressure Sensor
碩士 === 國立交通大學 === 電子研究所 === 84 === Microelectromechanical systems (MEMS) is predicted to be the star offuture industry. By means of the IC technology, the mechanical properties ofsilicon can be applied to many fields in our life. Microsen...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67817994272649683848 |