Fabrication and Properties od Dielectric Thin Films Grown by rf Magnetron Sputtering
碩士 === 國立交通大學 === 電子研究所 === 84 === The BaxSr1-xTiO3 (BST) film has attracted great attention due to its high dielectric constant, low leakage current, sesistance to process induced damage, good thermal stability and low dissipation factor...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01019097543527090561 |