Space-Charge Effects on Transport Phenomena between Workpiece and Plasma
碩士 === 國立中山大學 === 機械工程研究所 === 84 === Transport phenomena across the sheath and prehesth between a plasma and workpiece surface are kinetically investigated. Ion collisions simulating by the BGK model and ionization propose by Emmert et al....
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66462169941301472269 |