Space-Charge Effects on Transport Phenomena between Workpiece and Plasma
碩士 === 國立中山大學 === 機械工程研究所 === 84 === Transport phenomena across the sheath and prehesth between a plasma and workpiece surface are kinetically investigated. Ion collisions simulating by the BGK model and ionization propose by Emmert et al....
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
1996
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Online Access: | http://ndltd.ncl.edu.tw/handle/66462169941301472269 |