The Development of Gray Level Intensity method in Automatic Wafer Surface Inspection
碩士 === 國立清華大學 === 工業工程研究所 === 84 === In the semiconductor industry,manual inspection is less reliable due to the parts are becoming smaller and smaller. Thus, it is necessary use machine vision to replace the manual inspection.Automatic inspection has gai...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86483838861372381469 |