New Design Of PECVD System For The Application Of Both Sputter And Plasma Polymerization
碩士 === 國立清華大學 === 化學學系 === 84 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/79731028655381391410 |