New Design Of PECVD System For The Application Of Both Sputter And Plasma Polymerization
碩士 === 國立清華大學 === 化學學系 === 84 ===
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1996
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Online Access: | http://ndltd.ncl.edu.tw/handle/79731028655381391410 |