Positioning control of X-Y table for X-ray lithography stepper
碩士 === 國立清華大學 === 動力機械學系 === 84 === The purpose of this study is focused on fast positioningontrol of the X-Y table for X-ray lithography stepper with linearotors. The primary requirements of this controller are to enhancehe stability of the system and ma...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34714703397614713798 |