The Manufacture and Test of (110) Orientation Silicon Base Micro Heat Exchanger
碩士 === 淡江大學 === 機械工程學系 === 84 === The novel micro heat exchanger made of (110)-orientated silicon is fabricatedby bulk micromachining that is compatible with semiconductor producing processes, and wafers with hundreds of high aspect rati...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99010343661167288093 |