Sol-Gel Derived Ferroelectric PZT Thin Films for Memory, Optical Waveguide and SAW Applications
碩士 === 大同工學院 === 電機工程學系 === 84 === As larger mismatch and interdiffusion between PZT thin film and Si(100) substrateit is hard to crystallize and easy to crack for PZT thin film grown on Si. Thus wewe introduced buffer layers to grow highly...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06917311974749196846 |