Defect Pattern Quantization on Wafer Map and Its Applicationns
碩士 === 中華大學 === 電機工程研究所 === 85 === In this paper, a novel approach is proposed for defect pattern quantization on wafer map, which makes the defect patterns on the wafer map to be abstracted, recorded, and analyzed effectively and efficiently. By analyzing the syndrome of defect pattern distributio...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13565963517641988635 |