Preision Stepper Control
碩士 === 中華大學 === 電機工程研究所 === 85 === The accuracy is important to determine the quality of products in the modern industry. In recent semiconductor industry, the width of circuit is less than 0.25μm, so a stepper position control needs to achieve one-tenth of 0.25μm. However the settling time of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07832830378354448011 |