Development of a Generic Equipment Controller for the IC Manufacturing Facility: A Distributed Object-Oriented Approach
碩士 === 國立成功大學 === 製造工程研究所 === 85 === Semiconductor manufacturing is an industry with massive capital and high d epreciation. The cost of manufacturing equipment is extremely high. In order t o have better utilization of the equipment, an Equipment Manager...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48646017939239084392 |