Development of a Generic Equipment Controller for the IC Manufacturing Facility: A Distributed Object-Oriented Approach

• Main Authors: Huang, Cuo-Su, 黃國書
• Other Authors: Fan-Tien Cheng
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/48646017939239084392

碩士 === 國立成功大學 === 製造工程研究所 === 85 === Semiconductor manufacturing is an industry with massive capital and high d epreciation. The cost of manufacturing equipment is extremely high. In order t o have better utilization of the equipment, an Equipment Manager which can eff iciently control and monitor the equipment on line and in real time is needed. The purpose of this thesis is to develop a Generic Equipment Manager (GEMG) w hich can either operate stand-alone or be integrated with the Manufacturing Ex ecution System. Also, GEMG can agilely accommod the variations of company Busi ness Rules and machine Equipment Rules. Therefore, to make GEMG reusable is on e of the design goal. In order to achieve generality and reusability, the gove rning rules of GEMG are divided into three independent portions: System/Framew ork Rules, Business Rules, and Equipment Rules. The System/Framework Rules spe cify the requirements to become a pluggable component of MES Framework. The di stributed object-oriented technique is applied to design a CORBA Interface mod ule which inherits a suitable design pattern of MES Framework to accomplish th ese rules. The Business Rules are company-dependent and are equipment-independ ent. A Controller application module, which drive desired Scenarios, is develo ped to realize the Business Rules. The Equipment Rules are equipment-dependent and are company-independent. These Equipment Rules are achieved by an Equipme nt Driver module which compiles appropriate Behaviors. Considering reusability , the so-called Generic Equipment Interface (GEI) messages which are fine-grai ned, company- independent, and equipment-independent are developed to be the co mmunication messages between the Controller Application and Equipment Driver. The Scenarios and Behaviors are set up by editing the corresponding Scenario T able and Behavior Table. Therefore, reusability is easily accomplished. Severa l examples are shown to demonstrate the capabilities of generality and reusabi lity of GEMG.