Economic Design of Control Charts for Clustered Defects in IC Fabrication
碩士 === 國立交通大學 === 工業工程與管理學系 === 85 === The control charts are the most useful tool of statistical process control(SPC). Among various types of control charts, c- chart is used in IC fabrication to monitor the defect counts on wafers. As the surface area o...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49514707960358322168 |