The techniques for interpoly dielectric in high-density flash memory devices by using nitrogen passivation of polysilicon

碩士 === 國立交通大學 === 材料科學與工程研究所 === 85 === The flash-type EEPROM or flash-type EPROM is expected to be a most promising device for the next-generation nonvolatile memory market due to the growing demad high density non-volatile memory for...

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Bibliographic Details
Main Authors: Yu, Ming-Haw, 游明華
Other Authors: Edward Yi Chang, Huang-Chung Cheng
Format: Others
Language:zh-TW
Published: 1997
Online Access:http://ndltd.ncl.edu.tw/handle/19036788574742031493