Process Optimization of CVD Epitaxial Deposition Using Modified Genetic Algorithms
碩士 === 國立交通大學 === 控制工程系 === 85 === A vertical chemical vapor deposition process (CVD) optimization method using modified geneticalgorithms (MGA) has been proposed. Genetic algorithms (GA) are a computational optimization paradigm modeled after biological...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97649431188973815481 |