Plasma-induced Antenna Effect on the Deep Submicron Devices with Ultrathin Gate Oxides
博士 === 國立交通大學 === 電子工程學系 === 85 === In this thesis, the plasma-induced antenna effect on the reliability degradation of devices with ultrathin gate oxides is extensively investigated. This issue is very important in the modern integrated circuit (IC) manu...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61147722388644745624 |