The Applications of Ultrathin Dielectric and Roughened Poly-Si Electrodes for Memory Devices
博士 === 國立交通大學 === 電子工程學系 === 85 === In this thesis, the applications of ultrathin dielectric and roughened poly-Si electrodes for the high-density dynamic random-access memory (DRAM) have been studied. With increasing the density of DRAM, the unit cell ar...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/13531776201806215185 |