Characterization and Electrical Properties of Low-temperature Deposited SiC Thin Films
博士 === 國立交通大學 === 電子工程學系 === 85 === In this dissertation, we systematically study the roles of each experimental parameter played during the deposition of SiC by electron cyclotron resonance chemical vapor deposition (ECR- CVD). The film structures and el...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74339294033458291839 |