Electrically thermal-actuated silicon-membrane micro-valve
碩士 === 國立交通大學 === 電子工程學系 === 85 === In the research of microactuators in the Micro-Electro- Mechanical-System(MEMS), thermal actuation of integrated valve structure is valued and attractivedue to the relative simplicity of actuator desi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30974532951173231141 |