Physical and Electrical Properties of Spin-On Low Dielectric Constant Materials for ULSI Intermetal Dielectric Applications
碩士 === 國立交通大學 === 電子工程學系 === 85 === In this thesis, we explore five different kinds of spin-on low dielectric constant materials. We characterize their physical and electrical properties. In physical properties, we focus on film moisture...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/77468776464130134647 |