Properties and Fabrication of Reactively Magnetron Sputtered Ruthenium Dioxide Thin Films
碩士 === 國立交通大學 === 電子工程學系 === 85 === this study, we investigate the microstructure, electrical and thermal properties of RuO2 thin-film resistor grown on t包括 氧分壓,腔體之總壓,基板溫度DC magnetron sputtering. Processing variables in DC sputteringin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32924525019414871800 |